Schwaller, P., S. Zehnder, U. von Arx, and B. Neuenschwander. 2012. “Influence of the Pre-Treatment of Glass Substrates on Laser-Induced Backside Wet Etching Using NIR Nanosecond-Pulses and Cu-Based Solutions”. ALT Proceedings 1 (November). https://doi.org/10.12684/alt.1.41.