Schwaller, P., Zehnder, S., von Arx, U. and Neuenschwander, B. (2012) “Influence of the pre-treatment of glass substrates on Laser-Induced Backside Wet Etching using NIR Nanosecond-Pulses and Cu-based solutions”, ALT Proceedings, 1. doi: 10.12684/alt.1.41.