Construction of microfluidic biochips with enhanced functionalities using 3D femtosecond laser direct writing

Authors

  • Y. Cheng State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
  • Y. Liao State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
  • F. He State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
  • L. Qiao State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
  • K. Sugioka Laser Technology Laboratory, RIKEN - Advanced Science Institute, Hirosawa 2-1, Wako, Saitama 351-0198, Japan
  • K. Midorikawa Laser Technology Laboratory, RIKEN - Advanced Science Institute, Hirosawa 2-1, Wako, Saitama 351-0198, Japan

DOI:

https://doi.org/10.12684/alt.1.40

Abstract

The extreme nonlinear interaction betweenfemtosecond laser pulses and large-band-gapmaterials has enabled three-dimensional (3D)microfabrication inside transparent materials. In thepast decade, this technique has been used forcreating a variety of functional components in glassmaterials, including microoptics, microfluidics,microelectronics, micromechanics, etc. Using thesebuilding blocks, femtosecond laser microfabricationalso allows for construction of highly integratedmicrodevices. Here, we provide an overview of ourlatest progress made along this direction, includingfocal spot engineering and nanofluidic fabrication.In particular, we show that 3D micro-/nano-fluidiccomponents with arbitrary geometries can bedirectly formed inside glass. This opens uppromising prospects for a broad spectrum ofapplications based on compact and complex 3Dmicrofluidic networks. Our work shows that thistechnique holds promise for fabricating 3D hybridmicro-systems, such as Lab-on-a-chip devices andMicro Total Analysis Systems in the future.
ALT 12 Conference, Gwatt, Sept. 2 -6, Switzerland

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Published

2012-11-01

How to Cite

Cheng, Y., Liao, Y., He, F., Qiao, L., Sugioka, K., & Midorikawa, K. (2012). Construction of microfluidic biochips with enhanced functionalities using 3D femtosecond laser direct writing. ALT Proceedings, 1. https://doi.org/10.12684/alt.1.40

Issue

Vol. 1 (2012)

Section

Laser – matter interaction and processing technologies

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