Influence of the pre-treatment of glass substrates on Laser-Induced Backside Wet Etching using NIR Nanosecond-Pulses and Cu-based solutions

Authors

  • P. Schwaller Institute for Applied Laser, Photonics and Surface Technologies, Bern University of Applied Sciences, Pestalozzistrasse 20, CH-3400 Burgdorf
  • S. Zehnder Institute for Applied Laser, Photonics and Surface Technologies, Bern University of Applied Sciences, Pestalozzistrasse 20, CH-3400 Burgdorf
  • U. von Arx Department Architecture, Wood and Civil Engineering, Bern University of Applied Sciences, Solothurnstrasse 102, CH-2500 Biel
  • B. Neuenschwander Institute for Applied Laser, Photonics and Surface Technologies, Bern University of Applied Sciences, Pestalozzistrasse 20, CH-3400 Burgdorf

DOI:

https://doi.org/10.12684/alt.1.41

Abstract

Laser induced backside wet etching (LIBWE) has shown to be a promising tool for the micro-structuring of transparent materials. Our group has investigated LIBWE using NIR ns-laser pulses and Cu-based absorber liquids. Focus of this paper is to investigate the influence of the pre-treatment of the transparent substrate on ablation. For this purpose experiments were done on untreated and silanized soda lime glass surfaces. Our results show that depending on the absorber liquid the silanization of the substrate either enhances or delays the ablation. Possible ablation models for the different experimental settings will be discussed.
ALT 12 Conference, Gwatt, Sept. 2 -6, Switzerland

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Published

2012-11-01

How to Cite

Schwaller, P., Zehnder, S., von Arx, U., & Neuenschwander, B. (2012). Influence of the pre-treatment of glass substrates on Laser-Induced Backside Wet Etching using NIR Nanosecond-Pulses and Cu-based solutions. ALT Proceedings, 1. https://doi.org/10.12684/alt.1.41

Issue

Vol. 1 (2012)

Section

Laser – matter interaction and processing technologies

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