Photon Synthesis of Nanometric Films Based on Transitional Metal oxides for Multi-Parameter Sensors

Authors

  • S.A. Mulenko Institute for Metal Physics NAS of Ukraine, 03142, Kiev-142, Ukraine
  • A. Luches University of Salento, Department of Physics, 73100 Lecce, Italy
  • A.P. Caricato University of Salento, Department of Physics, 73100 Lecce, Italy
  • D. Valerini University of Salento, Department of Physics, 73100 Lecce, Italy

DOI:

https://doi.org/10.12684/alt.1.55

Abstract

The reactive pulsed laser deposition (RPLD) based on a KrF laser was used for photon synthesis of nanometric iron and chromium oxides films. RPLD allows controlling the thickness and stoichiometry of deposits with definite band gap. So RPLD was used for synthesizing nanometric iron and chromium oxides films for thermo-photo-chemical sensors. We compared sensing properties of iron and chromium oxides nanometric films deposited on <100>Si substrate by RPLD. These iron and chromium oxides films have semiconductor properties with the band gaps less than 1.0 eV. The largest photosensitivity of iron and chromium oxides films was about 44 Vc/W and 2.5 Vc/W, accordingly, for white light at power density ~ 6x10-3 W/cm2. Vc is “chemical” photo e.m.f.. Maximum value of thermo electromotive force (e.m.f.) coefficient of iron and chromium oxides films was about 1.65 mV/K and 3.5-4.5mV/K, accordingly. Iron oxides films were tested as chemical sensors: the largest sensitivity of NO molecules was at the level of 7x1012 cm-3. Our results showed that nanometric iron and chromium oxides films synthesized by UV photons can be used as up-to-date materials for multi-parameter sensors operating at moderate temperature.
ALT 12 Conference, Gwatt, Sept. 2 -6, Switzerland

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Published

2012-11-01

How to Cite

Mulenko, S., Luches, A., Caricato, A., & Valerini, D. (2012). Photon Synthesis of Nanometric Films Based on Transitional Metal oxides for Multi-Parameter Sensors. ALT Proceedings, 1. https://doi.org/10.12684/alt.1.55

Issue

Vol. 1 (2012)

Section

Laser – matter interaction and processing technologies

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